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The effect of hydrogen addition in argon-acetylene plasma on the structure of amorphous carbon films

The effect of hydrogen addition in argon-acetylene plasma on the structure of amorphous carbon films

Marcinauskas, Liutauras; Černauskas, Marius; Milieška, Mindaugas; Reso, Denis

期刊名称Journal of Non-Crystalline Solids
作者Marcinauskas, Liutauras; Černauskas, Marius; Milieška, Mindaugas; Reso, Denis
印刷ISSN0022-3093
文件大小2793.28KB
发表时间2017-4
DOI10.1016/j.jnoncrysol.2017.03.021

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