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Surface Damage Mechanism of Monocrystalline Si Under Mechanical Loading

Surface Damage Mechanism of Monocrystalline Si Under Mechanical Loading

Zhao, Qingliang; Zhang, Quanli; To, Suet; Guo, Bing

期刊名称Journal of Electronic Materials
作者Zhao, Qingliang; Zhang, Quanli; To, Suet; Guo, Bing
卷第46卷
期第3期
印刷ISSN0361-5235
电子ISSN1543-186X
文件大小1527.30KB
发表时间2017-3
DOI10.1007/s11664-016-5251-5
页码1862-1868

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