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Mode-matching analysis of a spit-circular cavity resonator for measurement of the dielectric constant for film on a substrate

Mode-matching analysis of a spit-circular cavity resonator for measurement of the dielectric constant for film on a substrate

Shibata, Kouji; Kobayashi, Masaki
  • 期刊名称IEEJ Transactions on Electrical and Electronic Engineering
  • 作者Shibata, Kouji; Kobayashi, Masaki
  • 卷第12卷
  • 印刷ISSN1931-4973
  • 文件大小423.40KB
  • 发表时间2017-06
  • DOI10.1002/tee.22418
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