Directed Self-Assembly and Pattern Transfer of Five Nanometer Block Copolymer Lamellae

Lane, Austin P.; Yang, XiaoMin; Maher, Michael J.; Blachut, Gregory; Asano, Yusuke; Someya, Yasunobu; Mallavarapu, Akhila; Sirard, Stephen M.; Ellison, Christopher J.; Willson, C. Grant

期刊名称ACS Nano
作者Lane, Austin P.; Yang, XiaoMin; Maher, Michael J.; Blachut, Gregory; Asano, Yusuke; Someya, Yasunobu; Mallavarapu, Akhila; Sirard, Stephen M.; Ellison, Christopher J.; Willson, C. Grant
印刷ISSN1936-0851
电子ISSN1936-086X
文件大小6672.90KB
发表时间2017-07-20
DOI10.1021/acsnano.7b02698

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Directed Self-Assembly and Pattern Transfer of Five Nanometer Block Copolymer Lamellae