Design, fabrication and characterization of flexible MEMS accelerometer using multi-Level UV-LIGA
- 期刊名称Sensors and Actuators A: Physical
- 作者Mahmood, Md. Sohel; Celik-Butler, Zeynep; Butler, Donald P.
- 卷第263卷
- 印刷ISSN0924-4247
- 文件大小4196.99KB
- 发表时间2017-08
- DOI10.1016/j.sna.2017.07.007
- 页码530-541
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