![Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafers]()
Evaluation of the soft x-ray reflectivity of micropore optics using anisotropic wet etching of silicon wafersMitsuishi, Ikuyuki; Ezoe, Yuichiro; Koshiishi, Masaki; Mita, Makoto; Maeda, Yoshitomo; Yamasaki, Noriko Y.; Mitsuda, Kazuhisa; Shirata, Takayuki; Hayashi, Takayuki; Takano, Takayuki · ao/49/6/ao-49-6-1007.pdf · 2010