Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases

Donko, Zoltan; Derzsi, Aranka; Korolov, Ihor; Hartmann, Peter; Brandt, Steven William; Schulze, Julian; Berger, Birk; Koepke, Mark E; Bruneau, Bastien; Johnson, Erik V; Lafleur, Trevor; Booth, Jean Paul; Gibson, Andrew Robert; O'Connell, Deborah; Gans, Timo

期刊名称Plasma Physics and Controlled Fusion
作者Donko, Zoltan; Derzsi, Aranka; Korolov, Ihor; Hartmann, Peter; Brandt, Steven William; Schulze, Julian; Berger, Birk; Koepke, Mark E; Bruneau, Bastien; Johnson, Erik V; Lafleur, Trevor; Booth, Jean Paul; Gibson, Andrew Robert; O'Connell, Deborah; Gans, Timo
印刷ISSN0741-3335
电子ISSN1361-6587
文件大小2393.28KB
发表时间2017-08-02
DOI10.1088/1361-6587/aa8378

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Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases