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Effect of NH
<sub/>2</sub>
OH on Etching Characteristics of Si{100} in KOH Solution

Effect of NH ₂ OH on Etching Characteristics of Si{100} in KOH Solution

Rao, Avvaru Venkata Narasimha; Swarnalatha, Veerla; Ashok, Akarapu; Singh, Sajal Sagar; Pal, Prem

期刊名称ECS Journal of Solid State Science and Technology
作者Rao, Avvaru Venkata Narasimha; Swarnalatha, Veerla; Ashok, Akarapu; Singh, Sajal Sagar; Pal, Prem
卷第6卷
期第9期
印刷ISSN2162-8769
电子ISSN2162-8777
文件大小693.33KB
发表时间2017
DOI10.1149/2.0161709jss

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