Soft X-ray irradiation effect on the fluorinated DLC film

• 期刊名称Diamond and Related Materials
• 作者Takamatsu, Hiroki; Niibe, Masahito; Zhou, XiaoLong; Komatsu, Keiji; Saitoh, Hidetoshi; Akasaka, Hiroki; Saiga, Akihiro; Tamada, Koji; Tagawa, Masahito; Yokota, Kumiko; Furuyama, Yuichi; Kanda, Kazuhiro
• 印刷ISSN0925-9635
• 文件大小640.70KB
• 发表时间2017-8
• DOI10.1016/j.diamond.2017.08.004