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Comparative analysis of methods for measurement of the surface potential of dielectrics charging under electron-beam irradiation in a scanning electron microscope

Comparative analysis of methods for measurement of the surface potential of dielectrics charging under electron-beam irradiation in a scanning electron microscope

Rau, E. I.; Tatarintsev, A. A.; Kupreenko, S. Yu.; Zaitsev, S. V.; Podbutsky, N. G.
  • 期刊名称Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
  • 作者Rau, E. I.; Tatarintsev, A. A.; Kupreenko, S. Yu.; Zaitsev, S. V.; Podbutsky, N. G.
  • 卷第11卷
  • 期第5期
  • 印刷ISSN1027-4510
  • 电子ISSN1819-7094
  • 文件大小687.64KB
  • 发表时间2017-9
  • DOI10.1134/S1027451017050354
  • 页码1062-1068
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