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Comparison of three optical diagnostic techniques for the measurement of boron atom density in a H<sub>2</sub>/B<sub>2</sub>H<sub>6</sub> microwave plasma

Comparison of three optical diagnostic techniques for the measurement of boron atom density in a H₂/B₂H₆ microwave plasma

Aubert, Xavier; Duluard, Corinne; Sadeghi, Nader; Gicquel, Alix

期刊名称Plasma Sources Science and Technology
作者Aubert, Xavier; Duluard, Corinne; Sadeghi, Nader; Gicquel, Alix
印刷ISSN0963-0252
电子ISSN1361-6595
文件大小740.01KB
发表时间2017-10-20
DOI10.1088/1361-6595/aa94d8

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