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Design and Test of A Micromachined Resonant Accelerometer with High Scale Factor and Low Noise

Yin, Yonggang; Fang, Zhengxiang; Han, Fengtian; Yan, Bin; Dong, Jingxin; Wu, Qiuping

期刊名称Sensors and Actuators A: Physical
作者Yin, Yonggang; Fang, Zhengxiang; Han, Fengtian; Yan, Bin; Dong, Jingxin; Wu, Qiuping
印刷ISSN0924-4247
文件大小1301.44KB
发表时间2017-10
DOI10.1016/j.sna.2017.10.043