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Young’s modulus of multi-layer microcantilevers

Deng, Zhikang; Deng, Jinglan; He, Liang; Zhuo, Rongshu; Zhu, Ruiqi; Shi, Yang; Liu, Hui; Yang, Wei; Yuan, Hui; Chen, Yiming; Huang, Yue; Zheng, Yi

期刊名称AIP Advances
作者Deng, Zhikang; Deng, Jinglan; He, Liang; Zhuo, Rongshu; Zhu, Ruiqi; Shi, Yang; Liu, Hui; Yang, Wei; Yuan, Hui; Chen, Yiming; Huang, Yue; Zheng, Yi
卷第7卷
期第12期
电子ISSN2158-3226
文件大小4295.75KB
发表时间2017-12
DOI10.1063/1.5011212