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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - New parallelogram 3D-displacement sensor for micro probing and dimensional metrology

[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - New parallelogram 3D-displacement sensor for micro probing and dimensional metrology

Metz, David; Dietzel, Andreas

作者Metz, David; Dietzel, Andreas
文件大小1453.92KB
发表时间2017
DOI10.1109/TRANSDUCERS.2017.7994215
页码982-985

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