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[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Mechanical strength of 2.5D parylene C micropore-arrayed filtration membrane

[IEEE 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Kaohsiung (2017.6.18-2017.6.22)] 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Mechanical strength of 2.5D parylene C micropore-arrayed filtration membrane

Dai, Wangzhi; Liu, Yaoping; Fu, Yutong; Xu, Han; Su, Fei; Wu, Jian; Wang, Wei
  • 作者Dai, Wangzhi; Liu, Yaoping; Fu, Yutong; Xu, Han; Su, Fei; Wu, Jian; Wang, Wei
  • 文件大小1181.76KB
  • 发表时间2017
  • DOI10.1109/TRANSDUCERS.2017.7994273
  • 页码1215-1217
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