[IEEE 2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO) - Pittsburgh, PA, USA (2017.7.25-2017.7.28)] 2017 IEEE 17th International Conference on Nanotechnology (IEEE-NANO) - Characterizing the resonant behavior and quality factors of 3C-SiC diaphragms using frequency analysis and the ring-down technique
Sui, Yongkun; Chong, Hao; Shara, Kailey; Zorman, Christian A.
- 作者Sui, Yongkun; Chong, Hao; Shara, Kailey; Zorman, Christian A.
- 文件大小745.46KB
- 发表时间2017
- DOI10.1109/nano.2017.8117358
- 页码811-815