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Effects of Negative Bias Voltage and Ratio of Nitrogen and Argon on the Structure and Properties of NbN Coatings Deposited by HiPIMS Deposition System

Ding, Jicheng; Zhang, Tengfei; Mei, Haijuan; Yun, Je; Jeong, Seong; Wang, Qimin; Kim, Kwang

期刊名称Coatings
作者Ding, Jicheng; Zhang, Tengfei; Mei, Haijuan; Yun, Je; Jeong, Seong; Wang, Qimin; Kim, Kwang
卷第8卷
期第1期
电子ISSN2079-6412
文件大小6216.63KB
发表时间2017-12-24
DOI10.3390/coatings8010010