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MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope

MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope

Wang, Xiaodong; Mao, Shengcheng; Zhang, Jianfei; Li, Zhipeng; Deng, Qingsong; Ning, Jin; Yang, Xudong; Wang, Li; Ji, Yuan; Li, Xiaochen; Liu, Yinong; Zhang, Ze; Han, Xiaodong
  • 期刊名称Micromachines
  • 作者Wang, Xiaodong; Mao, Shengcheng; Zhang, Jianfei; Li, Zhipeng; Deng, Qingsong; Ning, Jin; Yang, Xudong; Wang, Li; Ji, Yuan; Li, Xiaochen; Liu, Yinong; Zhang, Ze; Han, Xiaodong
  • 卷第8卷
  • 期第2期
  • 电子ISSN2072-666X
  • 文件大小6658.97KB
  • 发表时间2017-01-24
  • DOI10.3390/mi8020031
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