Modular packaging concept for MEMS and MOEMS
- 期刊名称Journal of Physics: Conference Series
- 作者Stenchly, Vanessa; Reinert, Wolfgang; Quenzer, Hans-Joachim
- 卷第922卷
- 印刷ISSN1742-6588
- 电子ISSN1742-6596
- 文件大小1086.46KB
- 发表时间2017-11
- DOI10.1088/1742-6596/922/1/012015
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