[IEEE 2017 IEEE 7th Annual International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER) - Honolulu, HI, USA (2017.7.31-2017.8.4)] 2017 IEEE 7th Annual International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER) - System Calibration Towards Automated Nanomanipulation Inside Scanning Electron Microscope
Wang, Mingyu; Wang, Yaqiong; Yang, Zhan; Chen, Tao; Sun, Lining; Fukuda, Toshio
- 作者Wang, Mingyu; Wang, Yaqiong; Yang, Zhan; Chen, Tao; Sun, Lining; Fukuda, Toshio
- 文件大小860.19KB
- 发表时间2017
- DOI10.1109/CYBER.2017.8446339
- 页码1135-1140