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Generic distortion model for metrology under optical microscopes

Liu, Xingjian; Li, Zhongwei; Zhong, Kai; Chao, YuhJin; Miraldo, Pedro; Shi, Yusheng

期刊名称Optics and Lasers in Engineering
作者Liu, Xingjian; Li, Zhongwei; Zhong, Kai; Chao, YuhJin; Miraldo, Pedro; Shi, Yusheng
卷第103卷
印刷ISSN0143-8166
文件大小2326.79KB
发表时间2018-04
DOI10.1016/j.optlaseng.2017.12.006
页码119-126