Sensitivity optimization of micro-machined thermo-resistive flow-rate sensors on silicon substrates
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Shaun, Ferdous Jahan; Sarkar, Sreyash; Marty, Frederic; Poulichet, Patrick; Cesar, William; NEFZAOUI, Elyes; Bourouina, Tarik
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小719.43KB
- 发表时间2018-03-15
- DOI10.1088/1361-6439/aab6bd
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