Molecular ionization probability in cluster-SIMS

• 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
• 作者Wucher, Andreas
• 卷第36卷
• 期第3期
• 印刷ISSN2166-2746
• 电子ISSN2166-2754
• 文件大小1188.21KB
• 发表时间2018-05
• DOI10.1116/1.5018305