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Heteroepitaxial growth of ε-(Al
<sub/><i>x</i>
</sub>
Ga
<sub/>1−</sub><sub/><i>x</i>
</sub>
)
<sub/>2</sub>
O
<sub/>3</sub>
alloy films on
<i>c</i>
-plane AlN templates by mist chemical vapor deposition

Heteroepitaxial growth of ε-(Al _x Ga ₁₋_x ) ₂ O ₃ alloy films on c -plane AlN templates by mist chemical vapor deposition

Tahara, Daisuke; Nishinaka, Hiroyuki; Morimoto, Shota; Yoshimoto, Masahiro

期刊名称Applied Physics Letters
作者Tahara, Daisuke; Nishinaka, Hiroyuki; Morimoto, Shota; Yoshimoto, Masahiro
卷第112卷
期第15期
印刷ISSN0003-6951
电子ISSN1077-3118
文件大小1269.85KB
发表时间2018-04-09
DOI10.1063/1.5021296

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