Fabrication and Characterization of Silicon (100) Membranes for a Multi-beam Superconducting Heterodyne Receiver

• 期刊名称Journal of Low Temperature Physics
• 作者Ezaki, Shohei; Shan, Wenlei; Kojima, Takafumi; Gonzalez, Alvaro; Asayama, Shin’ichiro; Noguchi, Takashi
• 印刷ISSN0022-2291
• 电子ISSN1573-7357
• 文件大小573.61KB
• 发表时间2018-6-26
• DOI10.1007/s10909-018-2004-2