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A dual-driving piezoelectric DETF resonator with high quality factor and low multimode effect

A dual-driving piezoelectric DETF resonator with high quality factor and low multimode effect

Liu, Xinxin; Wang, Yixiang; Le, Xianhao; Xu, Zhonggui; Wu, Changju; Xie, Jin

期刊名称Journal of Micromechanics and Microengineering
作者Liu, Xinxin; Wang, Yixiang; Le, Xianhao; Xu, Zhonggui; Wu, Changju; Xie, Jin
卷第28卷
期第10期
印刷ISSN0960-1317
电子ISSN1361-6439
文件大小2495.80KB
发表时间2018-10-01
DOI10.1088/1361-6439/aacd2e

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