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[IEEE 2018 IEEE International Interconnect Technology Conference (IITC) - Santa Clara, CA, USA (2018.6.4-2018.6.7)] 2018 IEEE International Interconnect Technology Conference (IITC) - IITC 2018 Keynote Title CMOS/Cu BEOL Technology in Manufacturing: 20 Years and C

[IEEE 2018 IEEE International Interconnect Technology Conference (IITC) - Santa Clara, CA, USA (2018.6.4-2018.6.7)] 2018 IEEE International Interconnect Technology Conference (IITC) - IITC 2018 Keynote Title CMOS/Cu BEOL Technology in Manufacturing: 20 Years and C

文件大小1074.59KB
发表时间2018
DOI10.1109/IITC.2018.8430417
页码39-39

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