![[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Dopant channeling as a function of implant angle for low energy applications]()
[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Dopant channeling as a function of implant angle for low energy applicationsWalther, S.R.; Mehta, S.; Weeman, J.; Grouillet, A.; Brown, D. · 1998