Laser micromachining of silicon in air and ice layer
- 期刊名称Journal of Manufacturing Processes
- 作者Tangwarodomnukun, Viboon; Mekloy, Seksit; Dumkum, Chaiya; Prateepasen, Asa
- 卷第36卷
- 印刷ISSN1526-6125
- 文件大小10328.96KB
- 发表时间2018-12
- DOI10.1016/j.jmapro.2018.10.008
- 页码197-208
[IEEE 2006 8th International Conference on Actual Problems of Electronic Instrument Engineering - Novosibirsk, Russia (2006.09.26-2006.09.28)] 2006 8th International Conference on Actual Problems of Electronic Instrument Engineering - 2006 8th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings2006
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[IEEE 2006 8th International Conference on Actual Problems of Electronic Instrument Engineering - Novosibirsk, Russia (2006.09.26-2006.09.28)] 2006 8th International Conference on Actual Problems of Electronic Instrument Engineering - 2006 8th International Conference on Actual Problems of Electronic Instrument Engineering Proceedings2006
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