Tape nanolithography: a rapid and simple method for fabricating flexible, wearable nanophotonic devices
Wang, Qiugu; Han, Weikun; Wang, Yifei; Lu, Meng; Dong, Liang
- 期刊名称Microsystems & Nanoengineering
- 作者Wang, Qiugu; Han, Weikun; Wang, Yifei; Lu, Meng; Dong, Liang
- 卷第4卷
- 期第1期
- 电子ISSN2055-7434
- 文件大小5125.37KB
- 发表时间2018-12
- DOI10.1038/s41378-018-0031-4