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Rapid On-Chip Healing of Metal Thin Films

Danzi, Stefano; Schnabel, Volker; Gabl, Johannes; Sologubenko, Alla; Galinski, Henning; Spolenak, Ralph

期刊名称Advanced Materials Technologies
作者Danzi, Stefano; Schnabel, Volker; Gabl, Johannes; Sologubenko, Alla; Galinski, Henning; Spolenak, Ralph
印刷ISSN2365-709X
文件大小2600.95KB
发表时间2018-11-06
DOI10.1002/admt.201800468