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Influence of precursor concentration and growth time on the surface morphology and crystallinity of α-Ga<sub>2</sub>O<sub>3</sub> thin films fabricated by mist chemical vapor deposition

Influence of precursor concentration and growth time on the surface morphology and crystallinity of α-Ga₂O₃ thin films fabricated by mist chemical vapor deposition

NAKABAYASHI, Yuji; YAMADA, Satoru; ITOH, Satoshi; KAWAE, Takeshi

期刊名称Journal of the Ceramic Society of Japan
作者NAKABAYASHI, Yuji; YAMADA, Satoru; ITOH, Satoshi; KAWAE, Takeshi
卷第126卷
期第11期
印刷ISSN1882-0743
电子ISSN1348-6535
文件大小4279.35KB
发表时间2018-11-1
DOI10.2109/jcersj2.18082
页码925-930

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