[IEEE 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Hangzhou, China (2018.8.13-2018.8.17)] 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Design of A Novel Piezoelectric Actuated Two-Degree-of-freedom Compliant Stage
- 作者Huang, Sishuo; jing, Xiubing; Shang, Peng; Wang, Fujun
- 文件大小686.70KB
- 发表时间2018
- DOI10.1109/3m-nano.2018.8552254
- 页码18-22
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