In-Situ Measurement of Outgassing Generated from EUV Metal Oxide Nanoparticles Resist During Electron Irradiation
- 期刊名称Journal of Photopolymer Science and Technology
- 作者Takahashi, Seiji; Minami, Hiroko; Matsumoto, Yoko; Minami, Yoichi; Kadoi, Mikio; Sekiguchi, Atsushi; Watanabe, Takeo
- 卷第31卷
- 期第2期
- 印刷ISSN0914-9244
- 电子ISSN1349-6336
- 文件大小1214.92KB
- 发表时间2018-6-25
- DOI10.2494/photopolymer.31.257
- 页码257-260
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