[IEEE 2018 15th International Conference on Control, Automation, Robotics and Vision (ICARCV) - Singapore, Singapore (2018.11.18-2018.11.21)] 2018 15th International Conference on Control, Automation, Robotics and Vision (ICARCV) - Detection and Compensation of Motion Error for Nanomanipulation Platform in Scanning Electron Microscope
Wang, Mingyu; Wang, Yaqiong; Yang, Zhan; Chen, Tao; Sun, Lining; Fukuda, Toshio
- 作者Wang, Mingyu; Wang, Yaqiong; Yang, Zhan; Chen, Tao; Sun, Lining; Fukuda, Toshio
- 文件大小759.37KB
- 发表时间2018
- DOI10.1109/ICARCV.2018.8581134
- 页码98-102