Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review
- 期刊名称Micromachines
- 作者Klemenschits, Xaver; Selberherr, Siegfried; Filipovic, Lado
- 卷第9卷
- 期第12期
- 电子ISSN2072-666X
- 文件大小6286.90KB
- 发表时间2018-11-29
- DOI10.3390/mi9120631
[ACS Symposium Series] Phosphorus Chemistry Volume 486 (Developments in American Science) || Phosphorus Chemistry, Copyright, ACS Symposium Series, ForewordWalsh, Edward N.; Griffith, Edward J.; Parry, Robert W.; Quin, Louis D. · 1992
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || Phosphorus Chemistry, Copyright, ACS Symposium Series, FOREWORDQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 486 (Developments in American Science) || The Role of Phosphorus in Chemistry and BiochemistryWalsh, Edward N.; Griffith, Edward J.; Parry, Robert W.; Quin, Louis D. · 1992
[ACS Symposium Series] Phosphorus Chemistry Volume 486 (Developments in American Science) || Phosphorus Atoms in Unusual EnvironmentsWalsh, Edward N.; Griffith, Edward J.; Parry, Robert W.; Quin, Louis D. · 1992
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || Nucleophilic Substitution at Pentacoordinated PhosphorusQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || Reactivity of Tricoordinated Phosphorus CompoundsQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || Small Rings with Tervalent PhosphorusQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || INDEXQuin, Louis D.; Verkade, John G. · 1981
Materials: Sticking the unstickableQuin, Louis D.; Verkade, John G. · Nature · 2012
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || INDEXQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || PREFACEQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || PhosphonodipeptidesQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || AlkenylfluorocyclotriphosphazenesQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || Phosphorylated KetenesQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || POSTER PRESENTATIONSQuin, Louis D.; Verkade, John G. · 1981
[ACS Symposium Series] Phosphorus Chemistry Volume 171 (Proceedings of the 1981 International Conference) || Polymerization of HexachlorocyclotriphosphazeneQuin, Louis D.; Verkade, John G. · 1981