[IEEE 2018 IEEE SENSORS - New Delhi, India (2018.10.28-2018.10.31)] 2018 IEEE SENSORS - A Resonant Pressure Micro Sensor with a Stress Isolation Layer
- 作者Lu, Yulan; Xie, Bo; Wei, Qiuxu; Li, Yadong; Shi, Xiaoqing; Xiang, Chao; Chen, Deyong; Wang, Junbo; Chen, Jian
- 文件大小7.46KB
- 发表时间2018
- DOI10.1109/ICSENS.2018.8589846
- 页码1-4
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