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Thermodynamic analysis of chemical processes in Ni/Cr/Si structure for carbon nanotubes growing by CVD

Thermodynamic analysis of chemical processes in Ni/Cr/Si structure for carbon nanotubes growing by CVD

Il’in, O I; Rudyk, N N; Il’ina, M V; Klimin, V S; Fedotov, A A; Ageev, O A

期刊名称Journal of Physics: Conference Series
作者Il’in, O I; Rudyk, N N; Il’ina, M V; Klimin, V S; Fedotov, A A; Ageev, O A
卷第1135卷
印刷ISSN1742-6588
电子ISSN1742-6596
文件大小601.40KB
发表时间2018-12
DOI10.1088/1742-6596/1135/1/012033

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