Nanocomposite of polycrystalline silicon and carbon nanotubes for micro- and nanomechanical systems
- 期刊名称Journal of Physics: Conference Series
- 作者Gusev, E Yu; Jityaeva, J Y; Rudyk, N N; Ageev, O A
- 卷第1135卷
- 印刷ISSN1742-6588
- 电子ISSN1742-6596
- 文件大小1148.72KB
- 发表时间2018-12
- DOI10.1088/1742-6596/1135/1/012032
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