Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern
- 期刊名称Micro and Nano Systems Letters
- 作者Narasimha Rao, Avvaru Venkata; Swarnalatha, Veerla; Pandey, Ashok Kumar; Pal, Prem
- 卷第6卷
- 期第1期
- 电子ISSN2213-9621
- 文件大小2462.00KB
- 发表时间2018-12
- DOI10.1186/s40486-018-0066-1
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