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Stability analysis of an electrostatically actuated out of plane MEMS structure

Azimloo, Hadi; Rezazadeh, Ghader; Shabani, Rasoul; Sheikhlou, Mehrdad; Marnani, Hamed Sadeghian

期刊名称Microsystem Technologies
作者Azimloo, Hadi; Rezazadeh, Ghader; Shabani, Rasoul; Sheikhlou, Mehrdad; Marnani, Hamed Sadeghian
印刷ISSN0946-7076
电子ISSN1432-1858
文件大小1579.16KB
发表时间2019-1-2
DOI10.1007/s00542-018-4282-7