Electrically-assisted nanoimprint of block copolymers

Mayer, Andre; Ai, Wenyang; Rond, Johannes; Staabs, Johannes; Steinberg, Christian; Papenheim, Marc; Scheer, Hella-Christin; Tormen, Massimo; Cian, Alesandro; Zajadacz, Joachim; Zimmer, Klaus

期刊名称Journal of Vacuum Science & Technology B
作者Mayer, Andre; Ai, Wenyang; Rond, Johannes; Staabs, Johannes; Steinberg, Christian; Papenheim, Marc; Scheer, Hella-Christin; Tormen, Massimo; Cian, Alesandro; Zajadacz, Joachim; Zimmer, Klaus
卷第37卷
期第1期
印刷ISSN2166-2746
电子ISSN2166-2754
文件大小3053.26KB
发表时间2019-01
DOI10.1116/1.5048204

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Electrically-assisted nanoimprint of block copolymers