Optical, electrical and microstructural properties of SiC thin films deposited by reactive dc magnetron sputtering

• 期刊名称Thin Solid Films
• 作者Tavsanoglu, T.; Zayim, E.O.; Agirseven, O.; Yildirim, S.; Yucel, O.
• 印刷ISSN0040-6090
• 文件大小5543.27KB
• 发表时间2019-1
• DOI10.1016/j.tsf.2019.01.047