Electromagnetic silicon MEMS resonator
- 期刊名称Electrical Engineering in Japan
- 作者Watanabe, Yoshiyuki; Yahagi, Toru; Abe, Yutaka; Murayama, Hiroki
- 卷第206卷
- 期第2期
- 印刷ISSN0424-7760
- 文件大小1161.26KB
- 发表时间2019-01
- DOI10.1002/eej.23154
- 页码54-60
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