High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technology
- 期刊名称Journal of Vacuum Science & Technology B
- 作者Lenk, Claudia; Krivoshapkina, Yana; Hofmann, Martin; Lenk, Steve; Ivanov, Tzvetan; Rangelow, Ivo W.; Ahmad, Ahmad; Reum, Alexander; Holz, Mathias; Glinsner, Thomas; Eibelhuber, Martin; Treiblmayr, Dominik; Schamberger, Barbara; Chouiki, Mustapha; Chan, Boon Teik; el Otell, Ziad; de Marneffe, Jean-François
- 卷第37卷
- 期第2期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小5826.70KB
- 发表时间2019-03
- DOI10.1116/1.5067269
Author replyBennie H. Jeng; David M. Meisler; Roger H.S. Langston; Joe G. Hollyfield; Lynn Schoenfield; James T. McMahon; Michael S. Lee; Anat Galor · 2009
EditorialLangston, Lee S. · Journal of Engineering for Gas Turbines and Power · 2002
Hot PlatesLangston, Lee S. · Mechanical Engineering · 2016
Blade Tips - Clearance and Its ControlLangston, Lee S. · Mechanical Engineering · 2013
Anticipated but UnwelcomeLangston, Lee S. · Mechanical Engineering · 2018
Some Details of Jet Engine ThrustLangston, Lee S. · Mechanical Engineering · 2016
Gas Turbine Disc Resurrection?Langston, Lee S. · Mechanical Engineering · 2016
Gears Steer New Engine DesignsLangston, Lee S. · Mechanical Engineering · 2017
CO2 reduction from cement industryBenghida, Djamil · Advanced Materials, Mechanical and Structural Engineering (Proceedings of the 2nd International Conference of Advanced Materials, Mechanical and Structural Engineering (AMMSE 2015), Je-ju Island, South Korea, September 18-20, 2015) · 2016
Thermoacoustically controlled Helmholtz resonatorsMatveev, K. I. · Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science · 2013
Precision forgingDean, T A · Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science · 2000
Multivariable System RegulationWhalley, R; Ebrahimi, M · Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science · 2006
Dimensional analysis revisitedButterfield, R · Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science · 2001
EditorialDowson, D. · Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science · 2004
Centrifugal compressor designCame, P. M.; Robinson, C. J. · Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science · 1998
Turbocharger aerodynamic designFlaxington, D; Swain, E · Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science · 1999