Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm
- 期刊名称Sensors
- 作者Brand, Uwe; Xu, Min; Doering, Lutz; Langfahl-Klabes, Jannick; Behle, Heinrich; Bütefisch, Sebastian; Ahbe, Thomas; Peiner, Erwin; Völlmeke, Stefan; Frank, Thomas; Mickan, Bodo; Kiselev, Ilia; Hauptmannl, Michael; Drexel, Michael
- 卷第19卷
- 期第6期
- 电子ISSN1424-8220
- 文件大小18490.65KB
- 发表时间2019-03-22
- DOI10.3390/s19061410
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