Nanosecond pulsed laser ablation of silicon – finite element simulation and experimental validation
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Zhang, Jun-Jie; Zhao, Liang; Rosenkranz, Andreas; Song, Chengwei; Yan, Yongda; Sun, Tao
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小517.65KB
- 发表时间2019-05-09
- DOI10.1088/1361-6439/ab208b
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