Effects of deposition temperature on the properties of sputtered yttrium-doped hafnium oxide thin films
- 期刊名称Materials Research Express
- 作者Zhao, Peng; Zhou, Dayu; Liu, Feng; Sun, Nana; Li, Shuaidong
- 电子ISSN2053-1591
- 文件大小945.11KB
- 发表时间2019-05-28
- DOI10.1088/2053-1591/ab2518