A Monolithic Integration Bio-inspired Three-Dimensional MEMS Vector Hydrophone

• 期刊名称IEEE Access
• 作者Song, Jinlong; Wang, Renxin; Zhang, Guojun; Shang, Zhenzhen; Zhang, Lansheng; Zhang, Wendong
• 电子ISSN2169-3536
• 文件大小1151.23KB
• 发表时间2019
• DOI10.1109/ACCESS.2019.2924990
• 页码1-1