Erosion rates of diffuse and constricted magnetron discharges in helium over aluminium, gallium, molybdenum, and tantalum
- 期刊名称Journal of Physics D: Applied Physics
- 作者Allen, Christopher A; Hitchon, W Nick G; Aceto, Steven C; Smith, David J; Sommerer, Timothy J; Trotter, Jason F; Lawler, James E
- 印刷ISSN0022-3727
- 电子ISSN1361-6463
- 文件大小311.06KB
- 发表时间2019-07-19
- DOI10.1088/1361-6463/ab33e1
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